TYPE
（mm）

 
Square ness between adjacent measuring

 
Straightness of measuring surface

 
Parallelism between opposite
measuring surface

  Precision grade(µm)

00

0

00

0

00

0

160×160
200×200
250×250
315×315
400×400
500×500
　

2
2
2.2
2.6
3
3.5
　

4
4
4.5
5.2
6
7
　

0.8
0.9
1
1.1
1.3
1.5

1.7
1.8
2
2.3
2.6
3

2
2
2.2
2.6
3
3.5
　

4
4
4.5
5.5
6
7