TYPE
（mm）

Flatness of working surface&
parallelism of
opposite surface

Square ness between working surface

Tolerance of h.w
between a matched pair
　

  Precision grade (µm)

00

0

00

0

00

0

160×25×16
250×40×25
400×63×40
630×100×63

1.5
2
4
6

3
4
8
12

20
30
40
50

40
60
80
100

1.5
2
4
6

3
4
8
12

TYPE
（mm）

Straightness&flatness of working surface

Parallelism between working surface
　

 Squareness between working surface and surface

   Precision grade(µm)

00

0

00

0

00

0

400×60×25
630×100×35
1000×160×50
1600×250×80
2000×30×100

1.6
2.1
3.0
4.4
5.4
　

2.6
3.5
5.0
7.4
10.0
　

2.4
3.2
4.5
6.6
8.1
　

3.9
5.3
7.5
11.1
13.5
　

8.0
10.5
15
22
27

13
18
25
37
45